Alternate Title: Planarization Process of Cavity Structure Using PSG Sacrificial Layer. (English)

المؤلفون: 冯志博, 刘启迪, 倪 烨, 董晟园, 张智欣, 于海洋, 孟腾飞

المصدر: Micronanoelectronic Technology; May2024, Vol. 61 Issue 5, p1-8, 8p