المؤلفون: Cheng-Che Hsu, David B. Graves, J. W. Coburn, Mark A Nierode

المصدر: Journal of Physics D: Applied Physics. 39:3272-3284

مصطلحات موضوعية: Electron density, Work (thermodynamics), Acoustics and Ultrasonics, Chemistry, Plasma, Electron, Condensed Matter Physics, Inductive coupling, Surfaces, Coatings and Films, Electronic, Optical and Magnetic Materials, Ion, Physics::Plasma Physics, Physics::Space Physics, Boundary value problem, Atomic physics, Inductively coupled plasma

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3128a49c8798fc08e6ac9369f1bef4ee
https://doi.org/10.1088/0022-3727/39/15/009

المؤلفون: David B. Graves, C. C. Hsu, J. W. Coburn

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 24:1-8

مصطلحات موضوعية: Plasma etching, Chemistry, fungi, technology, industry, and agriculture, Analytical chemistry, macromolecular substances, Surfaces and Interfaces, Substrate (electronics), Condensed Matter Physics, Isotropic etching, Surfaces, Coatings and Films, stomatognathic system, Etching (microfabrication), Wafer, Dry etching, Reactive-ion etching, Deposition (law)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b599c78df557bb6e715080734feade1d
https://doi.org/10.1116/1.2121751

المؤلفون: Yoshie Kimura, David B. Graves, J. W. Coburn

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 22:2508-2516

مصطلحات موضوعية: Argon, Chemistry, Radical, Analytical chemistry, Flux, chemistry.chemical_element, Surfaces and Interfaces, Condensed Matter Physics, Surfaces, Coatings and Films, Ion, Etching (microfabrication), Fluorocarbon, Thin film, Deposition (law)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::9291aa024f3a9f1d84d8fbd7fb445aa5
https://doi.org/10.1116/1.1810166

المؤلفون: J. W. Coburn, Jeffrey Chang

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 21:S145-S151

مصطلحات موضوعية: Physics, Plasma surface, Nanotechnology, Surfaces and Interfaces, Plasma, Condensed Matter Physics, Surfaces, Coatings and Films

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::19ee458dd07028665fa27dabb98a87c8
https://doi.org/10.1116/1.1600452

المؤلفون: David B. Graves, M. T. Radtke, J. W. Coburn

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 21:1038-1047

مصطلحات موضوعية: Number density, Chemistry, Analytical chemistry, Surfaces and Interfaces, Condensed Matter Physics, Mass spectrometry, Dissociation (chemistry), Surfaces, Coatings and Films, Ion, symbols.namesake, Physics::Plasma Physics, Ionization, Physics::Atomic and Molecular Clusters, symbols, Langmuir probe, Plasma diagnostics, Inductively coupled plasma, Atomic physics

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::21ba0f82a8c368dcc79c067b85323b49
https://doi.org/10.1116/1.1582456

المؤلفون: David B. Graves, D. Fraser, Frank Greer, J. W. Coburn

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 21:96-105

مصطلحات موضوعية: Inorganic chemistry, Analytical chemistry, chemistry.chemical_element, Surfaces and Interfaces, Quartz crystal microbalance, Substrate (electronics), Chemical vapor deposition, Condensed Matter Physics, Surfaces, Coatings and Films, Atomic layer deposition, chemistry, Vacuum deposition, X-ray photoelectron spectroscopy, Thin film, Tin

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ea5856c4722edac8a32248dcb7f4cd88
https://doi.org/10.1116/1.1524145

المؤلفون: Eric Kay, J. W. Coburn

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 35:05C101

مصطلحات موضوعية: 010302 applied physics, Ion implantation, Chemistry, 0103 physical sciences, Nanotechnology, 02 engineering and technology, Surfaces and Interfaces, Sputter deposition, 021001 nanoscience & nanotechnology, 0210 nano-technology, Condensed Matter Physics, 01 natural sciences, Surfaces, Coatings and Films

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::ab8559481327e183e9f0a6204fe6711f
https://doi.org/10.1116/1.4989563

المؤلفون: Harmeet Singh, J. W. Coburn, David B. Graves

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 19:718-729

مصطلحات موضوعية: Number density, Argon, Plasma parameters, Analytical chemistry, chemistry.chemical_element, Surfaces and Interfaces, Plasma, Condensed Matter Physics, Surfaces, Coatings and Films, Ion, chemistry, Electron temperature, Plasma diagnostics, Atomic physics, Inductively coupled plasma

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::4207d819b981c6ab831b02c185370fea
https://doi.org/10.1116/1.1354603

المؤلفون: Harmeet Singh, David B. Graves, J. W. Coburn

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 18:2680-2684

مصطلحات موضوعية: Work (thermodynamics), Chemistry, Radical, Analytical chemistry, Surfaces and Interfaces, Plasma, Condensed Matter Physics, Surfaces, Coatings and Films, Afterglow, law.invention, law, Vacuum pump, Fluorocarbon, Order of magnitude, Beam (structure)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::b263335bd7ca3e3880b53d46fc583121
https://doi.org/10.1116/1.1308585

المؤلفون: David B. Graves, Harmeet Singh, J. W. Coburn

المصدر: Journal of Applied Physics. 88:3748-3755

مصطلحات موضوعية: Number density, Chemistry, Radical, technology, industry, and agriculture, Analytical chemistry, General Physics and Astronomy, Plasma, Mass spectrometry, Dissociation (chemistry), symbols.namesake, symbols, Langmuir probe, Inductively coupled plasma, Recombination

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::277217f2fc3d887345bc8b2185c219c1
https://doi.org/10.1063/1.1289046

المؤلفون: J. W. Coburn, Harmeet Singh, David B. Graves

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 18:299-305

مصطلحات موضوعية: Chemical ionization, Chemistry, Ionization, Analytical chemistry, Thermal ionization, Surfaces and Interfaces, Condensed Matter Physics, Mass spectrometry, Electron ionization, Ion source, Surfaces, Coatings and Films, Ambient ionization, Atmospheric-pressure laser ionization

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3deb00fc3f61752198ca5b6e26526155
https://doi.org/10.1116/1.582183

المؤلفون: David B. Graves, Harmeet Singh, J. W. Coburn

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 17:2447-2455

مصطلحات موضوعية: Spectrometer, Chemistry, Selected reaction monitoring, Analytical chemistry, Surfaces and Interfaces, Condensed Matter Physics, Mass spectrometry, Surfaces, Coatings and Films, Secondary ion mass spectrometry, Mass spectrum, Atomic physics, Quadrupole mass analyzer, Beam (structure), Hybrid mass spectrometer

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::d6dd34f1f8016948da67d0b522e1740e
https://doi.org/10.1116/1.581981

المؤلفون: Gowri P. Kota, David B. Graves, J. W. Coburn

المصدر: Journal of Applied Physics. 85:74-86

مصطلحات موضوعية: Chemical kinetics, chemistry, Heteronuclear molecule, Computational chemistry, Chemisorption, Reactive intermediate, Halogen, Fluorine, General Physics and Astronomy, chemistry.chemical_element, Photochemistry, Molecular beam, Homonuclear molecule

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::a70e66a7272411b25aa7e57e35ca9189
https://doi.org/10.1063/1.369423

المؤلفون: Gowri P. Kota, J. W. Coburn, David B. Graves

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 17:282-290

مصطلحات موضوعية: Surface diffusion, Materials science, Bromine, Silicon, Inorganic chemistry, Analytical chemistry, chemistry.chemical_element, Surfaces and Interfaces, Tungsten, Condensed Matter Physics, Surfaces, Coatings and Films, chemistry, Chemisorption, Aluminium, Fluorine, Quartz

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::6770e09ffc5cb73c56ae6721ca7cecaa
https://doi.org/10.1116/1.581582

المؤلفون: J. W. Coburn, Gowri P. Kota, David B. Graves

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:2215-2221

مصطلحات موضوعية: Silicon, Inorganic chemistry, technology, industry, and agriculture, chemistry.chemical_element, Surfaces and Interfaces, Condensed Matter Physics, Oxygen, Surfaces, Coatings and Films, Ion, chemistry, Etching (microfabrication), Yield (chemistry), polycyclic compounds, Chlorine, Molecule, Vacuum chamber

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::c233d3c4b6c51b6a803193dff1425bd6
https://doi.org/10.1116/1.581330

المؤلفون: David B. Graves, Gowri P. Kota, J. W. Coburn

المصدر: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 16:270-277

مصطلحات موضوعية: inorganic chemicals, Materials science, Anodizing, fungi, technology, industry, and agriculture, Analytical chemistry, chemistry.chemical_element, Surfaces and Interfaces, Photoresist, Tungsten, engineering.material, Condensed Matter Physics, Surfaces, Coatings and Films, Polycrystalline silicon, chemistry, engineering, Vacuum chamber, Crystalline silicon, Molecular beam, Beam (structure)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::19eb14924a76aa2ad0df0bb1be229548
https://doi.org/10.1116/1.580982

المؤلفون: C. W. Bishop, J. C. Knutson, A. U. Tan, J. W. Coburn, B. S. Levine, R. B. Mazess, D. M. Kyllo

المصدر: Nephrology Dialysis Transplantation. 11:153-157

مصطلحات موضوعية: Vitamin, Transplantation, medicine.medical_specialty, Hyperparathyroidism, Hypercalcaemia, Calcitriol, business.industry, Parathyroid hormone, medicine.disease, chemistry.chemical_compound, Endocrinology, chemistry, Nephrology, Internal medicine, medicine, Vitamin D and neurology, Hypercalciuria, Secondary hyperparathyroidism, business, medicine.drug

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::3e6a4f085f87262c2efa815341463b99
https://doi.org/10.1093/ndt/11.supp3.153

المؤلفون: Charles B Mullins, J. W. Coburn

المصدر: Journal of Applied Physics. 76:7562-7566

مصطلحات موضوعية: Plasma etching, Silicon, Ion beam, Physics::Instrumentation and Detectors, Analytical chemistry, General Physics and Astronomy, chemistry.chemical_element, Atmospheric temperature range, Computer Science::Other, Ion, chemistry, Etching (microfabrication), Fluorine, Wafer

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e8537eb7d0f220aa4e9b8221ce332525
https://doi.org/10.1063/1.357990

المؤلفون: J. W. Coburn

المصدر: Applied Physics A Solids and Surfaces. 59:451-458

مصطلحات موضوعية: Surface (mathematics), Plasma etching, Physics and Astronomy (miscellaneous), Chemistry, Radical, fungi, technology, industry, and agriculture, General Engineering, Nanotechnology, General Chemistry, Plasma, Microstructure fabrication, Ion, Chemical physics, Etching (microfabrication), General Materials Science, Saturation (chemistry)

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::e968ce603c2cb1a297be78627343b1e8
https://doi.org/10.1007/bf00348262

المؤلفون: J. W. Coburn, Harold F. Winters

المصدر: ChemInform. 23

مصطلحات موضوعية: Glow discharge, Silicon, Chemistry, business.industry, chemistry.chemical_element, Nanotechnology, General Medicine, Engineering physics, Ion, Etching (microfabrication), Fluorine, Molecule, business, Beam (structure), Thermal energy

URL الوصول: https://explore.openaire.eu/search/publication?articleId=doi_________::876628ddd5a39e1c71e92e080aeaa2ea
https://doi.org/10.1002/chin.199241261